[16p-A22-1~22] CS.13 Code-sharing Session of 13.7 & 15.4

4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[16p-A22-15] Fabrication and characterization of Al-rich AlGaN multichannel Fin-structure

〇Takao Kozaka¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

AlN,Sputtering,FinFET