[16p-A22-1~22] CS.13 Code-sharing Session of 13.7 & 15.4

6:45 PM - 7:00 PM JST(9:45 AM - 10:00 AM UTC)

[16p-A22-22] Epitaxial growth of ScAlN/AlGaN/GaN heterostructures

〇Tomoya Okuda¹, Syunsuke Ota², Takahiko Kawahara³, Kozo Makiyama³, Ken Nakata³, Takuya Maeda⁴, Atsushi Kobayashi^1,2 (1.Grad. School, Tokyo Univ. of Science, 2.Tokyo Univ. of Science, 3.Sumitomo Electric Industries, 4.The Univ. of Tokyo)

Keywords:

ScAlN