[16p-B1-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[16p-B1-3] 4T vertical poly-Si TFT for pH sensor on glass substrates

〇Kosei Suzuki¹, Tetsuo Tabei², Akito Hara¹ (1.Tohoku Gakuin Univ., 2.Hiroshima Univ. RISE)

Keywords:

thin film transistor,poly-Si,vertical TFT