[16p-B1-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[16p-B1-4] Crystallization of a-Si Films Deposited by CVD using Blue Direct Diode Laser

〇Tatsuya Okada¹, Takashi Noguchi¹, Mitsuoki Hishida², Kentaro Miyano², Naohiko Kobata², Masaki Nobuoka² (1.Univ. Ryukyus, 2.Panasonic Connect)

Keywords:

Blue Direct Diode Laser