[16p-C302-1~18] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[16p-C302-8] Exploration of new intermetallic compounds for advanced interconnects using electron transport database obtained by DFT calculation

〇Masaya Iwabuchi¹, Junichi Koike¹ (1.Tohoku Univ.)

Keywords:

Interconnect for semiconductor,Intermetallic compound,Resistivity