[16p-C32-1~12] 16.1 Fundamental properties, evaluation, process and devices in disordered materials

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[16p-C32-10] Step-height measurement using interferometric microscope on phase change patterns in amorphous Ge-Sb-Te film

〇Kentaro Sugawara¹, Tamihiro Gotoh² (1.NMIJ/AIST, 2.Gunma Univ.)

Keywords:

phase change

Step height measurement and calibration using phase-shifting interferometric microscope have been developed in NMIJ/AIST. In this measurement, material difference between upper and lower surfaces of the step-height structure causes deviation from topographic step-height. It is also assumed that difference of material phase, amorphous and crystalline state, could be overlapped in the measured value. Phase change marks on chalcogenide Ge-Sb-Te films were evaluated, then the phase change effect around ~ 5 nm was obtained.