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[16p-C32-5]Fabrication of orthorhombic AgTe by room temperature sputtering deposition

〇(B)Yuta Tsuchihashi1, Jun Yamasawa1, Keito Tsukamoto1, Toshihiro Nakaoka1 (1.Sophia Univ.)
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Keywords:

chalcogenide

Several metastable phases with potentially innovative properties are difficult to synthesize. Orthorhombic AgTe, considered to be one such phase, was not artificially prepared until 2021. We reported the preparation of orthorhombic AgTe by anomalous diffusion from Ag nanoparticles in 2021. In this study, we report the formation of orthorhombic AgTe by sputter deposition at room temperature, a process compatible with semiconductor technology. The deposited thin films contained orthorhombic AgTe nanocrystals, amorphous AgxTe1-x, hexagonal Ag5−δTe3, and trigonal Te.

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