Presentation Information
[16p-P02-5]Crystallinity control of LiLaZrO thin film in plasma sputtering process
〇Ryoto Niwa1, Ryuta Murase1, Masayuki Ishihara1, Tomoki Omae1, Tomohisa Nakada1, Reon Yokoi1, Giichiro Uchida1 (1.Meijo Univ.)
Keywords:
Li ion battery,sputtering
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