Session Details
[16p-P02-1~12]8.2 Plasma deposition of thin film, plasma etching and surface treatment
Mon. Sep 16, 2024 1:30 PM - 3:30 PM JST
Mon. Sep 16, 2024 4:30 AM - 6:30 AM UTC
Mon. Sep 16, 2024 4:30 AM - 6:30 AM UTC
P02 (Exhibition Hall A)
[16p-P02-1]Comparison of precursor gases on etching resistivity of hydrogenated amorphous carbon films using CxHy + Ar plasma CVD
〇(D)Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Naoto Yamashita1, Kunihiro Kamataki1, Haruki Kiyama1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ.)
[16p-P02-2]Effect of ion irradiation on sp2/sp3 bond structure in a-C:H film deposited using precursor consisting aromatic ring
〇(M1)Manato Eri1, Shinjiro Ono1, Takamasa Okumura1, Naoto Yamashita1, Kunihiro Kamataki1, Haruki Kiyama1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ.)
[16p-P02-3]Relationship between deposition mechanisms and target surface using powder targets II
〇Hiroharu Kawasaki1, Takahiko Satake1 (1.Nat,l Ins. Tech., Sasebo Col.)
[16p-P02-4]Target Voltage Dependence of Discharge Characteristics in High-Power Impulse Magnetron Sputtering Plasmas
〇Motoki Abe1, Keita Kakinuma1, Takayuki Ohta2, Akinori Oda1 (1.Chiba Inst. Technol., 2.Meijo Univ)
[16p-P02-5]Crystallinity control of LiLaZrO thin film in plasma sputtering process
〇Ryoto Niwa1, Ryuta Murase1, Masayuki Ishihara1, Tomoki Omae1, Tomohisa Nakada1, Reon Yokoi1, Giichiro Uchida1 (1.Meijo Univ.)
[16p-P02-6]Nucleation Control of MoS2 Synthesis by Fluorine-Terminated Si Substrate
〇(M1)Ryotaro Kito1, Akihisa Ogino1 (1.Shizuoka Univ.)
[16p-P02-7]Hydrogenation of Magnesium-Based Materials by Air-Mixed Hydrogen Plasma Treatment
〇(M1)Keitatsu Ishikawa1, Akihisa Ogino1 (1.Shizuoka Univ.)
[16p-P02-8]Ion Bombardment Resistance of Hydrogen Terminated Diamond Cathodes
〇Jotaro Tashiro1, Shigeya Kimura2, Hisao Miyazaki2, Akihisa Ogino1 (1.Shizuoka Univ., 2.Toshiba Corp.)
[16p-P02-9]Cryogeonic oxidation of Si and Ge substrates using Ar/O2 DC discharge plasma irradiation
〇Yuya Yamamoto1, Koudai Kato1, Tetsuya Sato1, Youhei Outani2 (1.Yamanasi Univ., 2.Suwa Univ of Sci.)
[16p-P02-10]Adhesion of coated copper films on PTFE surfaces irradiated with a CH3+ ion beam
〇(M1C)Toshihiro Yokogawa1, Ichiro Takano2 (1.Grad School, Kogakuin Univ., 2.Kogakuin Univ.)
[16p-P02-11]Study on atmospheric pressure plasma generated at different driving frequencies to improve the printing quality of plastics
〇Takuto Nozawa1, Soma Chiku1, Shoma Sakamoto1, Hiromasa Yamada1 (1.NIT. Nagano college)
[16p-P02-12]Effects of Low Temperature Atmospheric Pressure Plasma on Dyeing of Textile Fabrics
〇Shoma Sakamoto1, Takuto Nozawa1, Soma Chiku1, Nobuyuki Ono1, Hiromasa Yamada1 (1.NIT. Nagano College)