[17a-B1-1~7] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[17a-B1-2] Development of thin film piezoelectric resonator

〇Yurina Amamoto¹, Koji Terumoto¹, Noriyuki Shimoji¹, Takashi Naiki¹, Kenji Goda¹, Takashi Kimura¹, Yoshiaki Oku¹ (1.Rohm Co., Ltd.)

Keywords:

resonator,MEMS