Presentation Information

9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[17a-B1-2]Development of thin film piezoelectric resonator

〇Yurina Amamoto¹, Koji Terumoto¹, Noriyuki Shimoji¹, Takashi Naiki¹, Kenji Goda¹, Takashi Kimura¹, Yoshiaki Oku¹ (1.Rohm Co., Ltd.)

resonator,MEMS

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