The 85th JSAP Autumn Meeting 2024
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Session Details

Oral presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[17a-B1-1~7]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Tue. Sep 17, 2024 9:00 AM - 11:00 AM JST
Tue. Sep 17, 2024 12:00 AM - 2:00 AM UTC
B1 (Exhibition Hall B)
Fumito Imura(Hundred Semiconductors Inc.), Yan Wu(Tokyo Inst. of Tech.)
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9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[17a-B1-1]Stress dependence of cantilever type a-InGaZnO TFTs

〇Shinnosuke Iwamatsu1,2, Takashi Mineta2 (1.Yamagata Res. Inst. Tech., 2.Yamagata Univ.)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[17a-B1-2]Development of thin film piezoelectric resonator

〇Yurina Amamoto1, Koji Terumoto1, Noriyuki Shimoji1, Takashi Naiki1, Kenji Goda1, Takashi Kimura1, Yoshiaki Oku1 (1.Rohm Co., Ltd.)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-B1-3]Suppression of Proof-Mass Geometry on Warpage in Highly Sensitive Gold Single-Axis MEMS Accelerometers

〇(B)Chihaya Mukaide1, Devi Srujana Tenneti1, Kisuke Miyado1, Torauto Yamada1, Katsuyuki Machida1, Tomoyuki Kurioka1, Tso-Fu Mark Chang1, Masato Sone1, Yoshihiro Miyake1, Hiroyuki Ito1 (1.TokyoTech.)
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9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17a-B1-4]Effect of Perforated Proof-Mass Hole Size on Brownian Noise BN of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing

〇(B)Torauto Yamada1, Kisuke Miyado1, Devi Srujana Tenneti1, Chihaya Mukaide1, Katsuyuki Machida1, Tso-Fu Mark Chang1, Tomoyuki Kurioka1, Masato Sone1, Yoshihiro Miyake1, Hiroyuki Ito1 (1.Tokyo Tech.)
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10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[17a-B1-5]Investigation of Factors that Degrade the Sensitivity of three-axes Piezo-resistive Accelerometer in Minimal-Fab Process

〇Hiroshige Kogayu1, Ryuhei Sekifuji1, Hiroyuki Tanaka2, Fumito Imura3, Takashi Yajima1, Shiro Hara1,2,3 (1.MINIMAL, 2.AIST, 3.Hundred)
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10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)English Presentation

[17a-B1-6]Visualization of strain distribution in MEMS resonators using stroboscopic differential interference contrast microscopy

〇Qian Liu1, Mirai Iimori1, Ya Zhang1 (1.Inst. of Eng., Tokyo Univ. of Agri. &Techno.)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[17a-B1-7]Development of smart CMP process control technology for 3D-structured FETs

〇Yuji Kasashima1, Takashi Matsukawa1, Kazuya Uejima1, Masashi Yamagishi1, Yoshihiro Hayashi1 (1.AIST SFRC)
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