[17a-C301-1~10] 6.4 Thin films and New materials

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[17a-C301-5] Hydrogen gas reaction in optical cavity type of sensor elements

〇Haruki Yamane¹, Satoshi Yanase¹, Koki Takahashi², Nobuya Seko², Koji Shigemura² (1.Akita Ind. Tech., 2.Tianma Japan)

Keywords:

sensor,hydrogen,optical thin film

The hydrogen reaction for optical stacked films (optical cavity sensor) was investigated by synchrotron radiation measurements. The optical cavity type of hydrogen sensor consists of a [hydrogen detection layer/optical interference layer/half mirror] stacked structure on a transparent substrate. The changes in optical properties of the hydrogen detection layer are measured by an incident light irradiated from the substrate. In this study, the hydrogen detection layer, which composed of [Pt/PdCuSi/PdAu], were evaluated for the crystal structure and chemical bonding states in a hydrogen atmosphere. Hydrogen exposure produced an anisotropic lattice expansion in the PdAu layer, and the Pt and PdCuSi layers acted as a surface catalytic and hydrogen permeable layers, respectively.