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[17a-P01-15]Voltage Application and Resistance Change to a-C Film using Gap Electrodes

〇Rikuta Nomura1, Kazuyoshi Ueno1 (1.Shibaura Inst. Tech.)
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Keywords:

nano carbon,Resistance change,voltage application

In this study, devices with a gap electrode structure in which current flows laterally through an amorphous carbon(a-C) film were fabricated, and the resistance change due to voltage application was investigated. a-C films were deposited on SiO2/Si substrates with gold electrodes with gap widths ranging from 15nm to 82nm, and voltage was applied up to 40V to measure the changes in I-V characteristics were measured. As a result, it was observed that the resistance between the gap electrodes changed with repeated voltage application.

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