[17a-P01-1~66] 17 Nanocarbon and Two-Dimensional Materials (Poster)

[17a-P01-48] Crystallinity evaluation of atomically layered films using fast Fourier transform of cross-sectional TEM images

〇Naoki Matsunaga¹, Takanori Shirokura², Hitoshi Wakabayashi² (1.Tokyo Tech, 2.Innovative Research)

Keywords:

transition metal dichalcogenides,Cross Section TEM,Fast Fourier Transform

Transition metal dichalcogenide (TMDC) films are expected to replace silicon as the next-generation channel, and the half width at half maximum (FWHM) of the Raman peak is used to evaluate crystallinity. However, multi reflections in multi-layer systems make the evaluation difficult. In this study, we proposed FFT of cross-sectional TEM images as an evaluation method independent of the substrate. This enables qualitative evaluation of TMDC films on different substrates.