[17p-B3-1~18] 6.1 Ferroelectric thin films

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[17p-B3-16] Development of PZT large-area recording media for practical ferroelectric recording

〇Yasuo Cho¹, Yoshiomi Hiranaga² (1.Tohoku Univ. NICHe, 2.Tohoku Univ. RIEC)

Keywords:

next generation ultra high density ferroelectric recording,scanning nonlinear dielectric microscopy,practical recording media

The authors are conducting research and development of next-generation ultra-high-density ferroelectric recording (Fe-HDD) using scanning nonlinear dielectric permittivity microscopy (SNDM). The specifications required for practical recording media can be summarized as (1) large area, (2) low cost, (3) high quality, and (4) mass production capability. In this study, single-crystal-like tetragonal PZT thin films were grown by a sputtering method on an 8-inch Si single-crystal substrate, which is large enough for Fe-HDD, and their polarization inversion characteristics were investigated.