[17p-B3-1~18] 6.1 Ferroelectric thin films

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-B3-7] Frequency dependence of piezoelectric response for (100)/(001)-oriented tetragonal Pb(Zr,Ti)O₃ films

〇(D)MIKI NAKAHATA¹, KAZUKI OKAMOTO¹, KEISUKE ISHIHAMA², TAKAO SHIMIZU³, TOMOYUKI KOGANEZAWA⁴, Rosantha Kumara⁴, TOMOTAKA NAKATANI⁴, OSAMU IKEDA⁴, OSAMI SAKATA⁴, TOMOAKI YAMADA^5,6, HIROSHI FUNAKUBO¹ (1.Tokyo Tech., 2.Univ. Tokyo, 3.NIMS, 4.JASRI, 5.Nagoya Univ., 6.MDX Tokyo Tech.)

Keywords:

piezoelectric response,tetragonal PZT films,domain structure

Although the piezoelectric and ferroelectric properties of Pb(Zr, Ti)O₃ (PZT) films have been widely studied, the crystal structure has not been sufficiently analyzed in detail for systems with multi-domain structures because of interactions between domains. In this study, the piezoelectric response of (100)/(001) oriented tetragonal PZT epitaxial films was evaluated by X-ray diffraction under electric field. The changes in the out-of-plane lattice parameters and volume fractions of the domains under an applied electric field were observed, and the intrinsic and extrinsic piezoelectric responses were analyzed at different frequencies.