[17p-C302-1~9] Materials for Green & Sustainable Semiconductor Manufacturing

2:40 PM - 3:10 PM JST(5:40 AM - 6:10 AM UTC)

[17p-C302-4] Direct Synthesis of Silicon Chemical Raw Materials from Silica

〇Norihisa Fukaya¹ (1.AIST)

Keywords:

Tetraalkoxysilane,silica

We will present a technology that enables highly efficient one-step direct synthesis of tetraalkoxysilane, a key raw material for the silicon chemical industry, by using inexpensive and abundant sand, plant combustion ash, and industrial by-products as silicon sources to react with alcohols.