The 85th JSAP Autumn Meeting 2024
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Session Details

Symposium (Oral)Symposium : Materials for Green & Sustainable Semiconductor Manufacturing

[17p-C302-1~9]Materials for Green & Sustainable Semiconductor Manufacturing

Tue. Sep 17, 2024 1:30 PM - 5:30 PM JST
Tue. Sep 17, 2024 4:30 AM - 8:30 AM UTC
C302 (Hotel Nikko 30F)
Noriyuki Uchida(AIST), Kotaro Makino(AIST)
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Symposium Sponsor
RESONAC
1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[17p-C302-1]Opening address

〇Noriyuki Uchida1 (1.AIST)
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1:40 PM - 2:10 PM JST(4:40 AM - 5:10 AM UTC)

[17p-C302-2]Contribution to Sustainability of Semiconductor Manufacturing by Mitsui Chemicals

〇Shoko Ono1 (1.Mitsui Chemicals)
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2:10 PM - 2:40 PM JST(5:10 AM - 5:40 AM UTC)

[17p-C302-3]Resonac's Initiatives Contributing to Green and Sustainable Development.

〇Hiroaki Takahashi1 (1.Resonac Corporation)
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2:40 PM - 3:10 PM JST(5:40 AM - 6:10 AM UTC)

[17p-C302-4]Direct Synthesis of Silicon Chemical Raw Materials from Silica

〇Norihisa Fukaya1 (1.AIST)
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3:10 PM - 3:40 PM JST(6:10 AM - 6:40 AM UTC)

[17p-C302-5]Fundamentals and Applications on Self-healing Ceramics -toward Applications in Semiconductor Manufacturing Processes-

〇Makoto Nanko1 (1.Nagaoka Univ. Tech.)
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3:50 PM - 4:20 PM JST(6:50 AM - 7:20 AM UTC)

[17p-C302-6]Estimation of CO2 Emissions Factor of materials for Green Semiconductor Manufacturing

〇Takehiro Yamaki1, Thuy Nguyen1, Sho Kataoka1 (1.AIST)
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4:20 PM - 4:50 PM JST(7:20 AM - 7:50 AM UTC)

[17p-C302-7]Prospects and progress report of SEMI Sustainability Initiative and Semiconductor Climate Consortium (SCC)

〇Reiko Eda1 (1.SEMI Japan)
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4:50 PM - 5:20 PM JST(7:50 AM - 8:20 AM UTC)English Presentation

[17p-C302-8]The embodied environmental impact of integrated circuit manufacturing

〇Lars-Ake Ragnarsson1 (1.imec)
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5:20 PM - 5:30 PM JST(8:20 AM - 8:30 AM UTC)

[17p-C302-9]Closing

〇Toshihiko Kanayama1 (1.AIST)
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