[17p-C302-1~9] Materials for Green & Sustainable Semiconductor Manufacturing

3:10 PM - 3:40 PM JST(6:10 AM - 6:40 AM UTC)

[17p-C302-5] Fundamentals and Applications on Self-healing Ceramics -toward Applications in Semiconductor Manufacturing Processes-

〇Makoto Nanko¹ (1.Nagaoka Univ. Tech.)

Keywords:

self-healing ceramics,crack,Diffusion

Self-healing ceramics have the ability to recover mechanical strength when non-oxide particles such as carbides and metals are dispersed in ceramics and the surface cracks are filled by the oxidation products developed by thermal oxidation. Applications of self-healing ceramics can be used as structural components in semiconductor manufacturing facilities such as a dry etching equipment realize a long service life of the components. In the present report, the fundamentals and applications of self-healing ceramics are explained, and the prospect of their application to the semiconductor manufacturing field is described.