Presentation Information
[17p-C302-5]Fundamentals and Applications on Self-healing Ceramics -toward Applications in Semiconductor Manufacturing Processes-
〇Makoto Nanko1 (1.Nagaoka Univ. Tech.)
Keywords:
self-healing ceramics,crack,Diffusion
Self-healing ceramics have the ability to recover mechanical strength when non-oxide particles such as carbides and metals are dispersed in ceramics and the surface cracks are filled by the oxidation products developed by thermal oxidation. Applications of self-healing ceramics can be used as structural components in semiconductor manufacturing facilities such as a dry etching equipment realize a long service life of the components. In the present report, the fundamentals and applications of self-healing ceramics are explained, and the prospect of their application to the semiconductor manufacturing field is described.
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