[17p-C302-1~9] Materials for Green & Sustainable Semiconductor Manufacturing

5:20 PM - 5:30 PM JST(8:20 AM - 8:30 AM UTC)

[17p-C302-9] Closing

〇Toshihiko Kanayama¹ (1.AIST)

Keywords:

carbon footprint,circular economy,life cycle assessment

Semiconductor manufacturing consumes a large amount of highest-grade materials, including Si wafers, various chemicals and gases, equipment components, and packaging materials. All these materials significantly contribute to the carbon footprint of semiconductor products. In this summary of the symposium, we discuss potential ways to achieve comprehensive zero emissions in the industry accumulating knowledge from academia.