Presentation Information

6:00 PM - 7:00 PM JST(9:00 AM - 10:00 AM UTC)

[17p-C41-11]Panel discussion

〇Atsushi Tanide^1,2, Hiromasa Tanaka², Kenji Ishikawa², Kenji Takahashi³, Tadatomo Suga⁴, Masahito Takakuwa⁴, Seiichi Hata⁵, Kosuke Takenaka⁶, Jianbo Liang⁷, Eiji Higurashi⁸ (1.SCREEN HD, 2.Nagoya Univ. cLPS, 3.AIST, 4.Tokyo Univ., 5.Nagoya Univ., 6.Osaka Univ., 7.Osaka Metropolitan Univ., 8.Tohoku Univ.)

Keywords:

plasma,bonding,semiconductor

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