[17p-D62-1~9] 7.3 Micro/Nano patterning and fabrication

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[17p-D62-4] Cross-linking of PDMS by irradiation of soft X-rays and dependence of
X-ray energy

〇SEIKO NAKAGAWA¹, MAKI OHARA², AKINARI YOKOYA², NORIKO USAMI³ (1.TIRI, 2.QST, 3.KEK)

Keywords:

cross-linking,soft X-ray,energy of X-ray

Cross-linking of polydimethysiloxane(PDMS) by irradiation of X-rays with 2.5 – 5 keV was studied. The cross-linking yield increased with the dose for irradiation with lower dose and was saturated for higher dose. The lower the energy of X-ray, the cross-linking yield was saturated with lower dose. Because of the lower energy of photo electrons, the irradiation of X-rays with lower energy should be high LET.