[17p-D63-1~16] 7.2 Applications and technologies of electron beams

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[17p-D63-10] Influence of a misaligned tip in field emitter array on electron beam

〇Hidekazu Murata¹, Yusuke Kawasaki¹, Yuto Suzuki¹, Takayuki Tanaka¹, Eiji Rokuta¹ (1.Meijo Univ.)

Keywords:

field emitter array,misaligned tip,boundary charge method

Field emitter arrays (FEAs), which consist of a large number of field emitters, are expected to be the next-generation electron source. However, there are many problems associated with their use, the most significant of which is the non-uniformity of the emission current of each emitter. One of the possible causes is the deviation from the rotational symmetry of the emitter. In this study, we have performed an ray tracing of electrons emitted from a misalined emitter in FEAs using the general 3-D boundary charge method (BCM).