The 85th JSAP Autumn Meeting 2024
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Session Details

Oral presentation7 Beam Technology and Nanofabrication : 7.2 Applications and technologies of electron beams

[17p-D63-1~16]7.2 Applications and technologies of electron beams

Tue. Sep 17, 2024 1:00 PM - 5:15 PM JST
Tue. Sep 17, 2024 4:00 AM - 8:15 AM UTC
D63 (Bandaijima Bldg)
Katsuhisa Murakami(AIST), Mitsunori Kitta(AIST), Hideo Morishita(Hitachi)
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1:00 PM - 1:15 PM JST(4:00 AM - 4:15 AM UTC)

[17p-D63-1]Measurement of atomic distances on crystal surfaces using ADF imaging in scanning transmission electron microscopy

〇Shunsuke Kobayashi1, Gen Koinuma1, Kousuke Ooe1, Kei Nakayama1, Satoshi Anada1, Akihide Kuwabara1 (1.JFCC)
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1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[17p-D63-2]Quantitative measurement of spatial coherence of electron beams using aperture

〇Jun Yamasaki1,2, Shuhei Hatanaka1 (1.Osaka Univ., 2.Nagoya Univ.)
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1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[17p-D63-3]Reconstruction of Wigner function of electron beams and deriviation of axial brightness formula

〇(D)Shuhei Hatanaka1,2, Jun Yamasaki1,3 (1.RC-UHVEM, Osaka Univ., 2.Grad. Sch. Eng., Osaka Univ., 3.IMaSS, Nagoya Univ.)
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1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[17p-D63-4]Proposal of a Sample for Electron Beam Size Estimation in Scanning Electron Microscope

Daichi Tokura1, Yuki Soshi1, 〇Yasunari Sohda1 (1.Univ. of Tsukuba)
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2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[17p-D63-5]High speed latent-pattern imaging for an electron beam resist by laser-based photoemission electron microscopy

〇Hirokazu Fujiwara1,2,3, Cedric Bareille1, Mario Okawa1, Toshiyuki Taniuchi2,3 (1.ISSP, 2.GSFS, 3.MIRC)
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2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-D63-6]Visualization of Ultrafast Change of Local Potential on a Photoconductive Antenna by Scanning Electron Microscopy

〇(M1)Gaku Nikorai Okamoto1, Yusuke Arashida1, Kohei Kawasaki1, Masaki Hada1, Shoji Yoshida1, Samuel Jeong1, Keishi Akada1,2, Jun-ichi Fujita1 (1.Tsukuba Univ., 2.JASRI)
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2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-D63-7]Interference experiment using single-electron detection with an SOI pixel detector

〇Yuichi Ishida1, Takafumi Ishida1,2, Makoto Kuwahara1,2, Yasuo Arai3, Koh Saitoh1,2 (1.Grad. Sch. of Eng., Nagoya Univ., 2.IMaSS, 3.KEK)
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2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[17p-D63-8]Development of high-speed recordable direct electron detectors using SOI technology

〇Takafumi Ishida1,2, Yuichi Ishida2, Makoto Kuwahara1,2, Yasuo Arai3, Koh Saitoh1,2 (1.IMaSS, Nagoya Univ., 2.Nagoya Univ., 3.KEK)
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3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[17p-D63-9]Simulation of Coulomb Effect in Spherical Electron Sources

Koki Himeda1, 〇Yasunari Sohda1 (1.Univ. of Tsukuba)
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3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[17p-D63-10]Influence of a misaligned tip in field emitter array on electron beam

〇Hidekazu Murata1, Yusuke Kawasaki1, Yuto Suzuki1, Takayuki Tanaka1, Eiji Rokuta1 (1.Meijo Univ.)
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3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-D63-11]In situ observation and individual tip evaluation of volcano-structured field emitter array with TiN coating

〇Yusuke Kawasaki1, Hidekazu Murata1, Hiromasa Murata2, Masayoshi Nagao2 (1.Meijo Univ., 2.AIST)
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4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[17p-D63-12]Investigation of sputtering condition for TiN coating on Si emitter

〇Hiromasa Murata1, Katsuhisa Murakami1, Masayoshi Nagao1 (1.AIST)
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4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[17p-D63-13]Chemical Changes on the Surface of CeB6 Single Crystal by Thermal Oxidation

〇Ryohei Tsuruta1, Shunsuke Yanagi1, Motoya Arai1, Kosuke Oba1, Masahiro Sasaki1, Yoichi Yamada1 (1.Univ. Tsukuba)
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4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[17p-D63-14]Evaluation of Emission Current from Surface Oxidized Cerium Hexaboride Field Emitter

〇Shunsuke Yanagi1, Ryohei Tsuruta1, Motoya Arai1, Kousuke Oba1, Masahiro Sasaki1, Yoichi Yamada1 (1.Univ. Tsukuba)
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4:45 PM - 5:00 PM JST(7:45 AM - 8:00 AM UTC)

[17p-D63-15]Energy Distribution of W Field Emitters Sharpened by the Field-assisted Oxygen Etching

〇Junki Shima1, Tatsuo Iwata1, Shigekazu Nagai1 (1.Grad. Sch. of Eng., Mie Univ.)
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5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[17p-D63-16]Field emission cathode using Ga-In liquid metal for compensation joule-heat

〇(M1)Hiroki Sato1,2, Yoichiro Neo1,2, Jonghyun Moon1,2, Rikuto Oda1,2 (1.Grad. Sch. of Eng. Shizuoka Univ., 2.RIE, Shizuoka Univ.)
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