[17p-D63-1~16] 7.2 Applications and technologies of electron beams

3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-D63-11] In situ observation and individual tip evaluation of volcano-structured field emitter array with TiN coating

〇Yusuke Kawasaki¹, Hidekazu Murata¹, Hiromasa Murata², Masayoshi Nagao² (1.Meijo Univ., 2.AIST)

Keywords:

field emitter array,electron optical instrument for evaluation of multi emitters,TiN coating

Volcano structured field emitter array (FEA), in which Si emitters are coated with TiN using reactive sputtering, are expected to be next-generation high-current vacuum devices. In this report, we have observed and measured the uniformity of the emission current of imdivisual tip of the TiN-coated FEA before and after aging (long time DC drive).