[17p-D63-1~16] 7.2 Applications and technologies of electron beams

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)

[17p-D63-12] Investigation of sputtering condition for TiN coating on Si emitter

〇Hiromasa Murata¹, Katsuhisa Murakami¹, Masayoshi Nagao¹ (1.AIST)

Keywords:

Field emitter array,Titanium nitride