[17p-D63-1~16] 7.2 Applications and technologies of electron beams

1:15 PM - 1:30 PM JST(4:15 AM - 4:30 AM UTC)

[17p-D63-2] Quantitative measurement of spatial coherence of electron beams using aperture

〇Jun Yamasaki^1,2, Shuhei Hatanaka¹ (1.Osaka Univ., 2.Nagoya Univ.)

Keywords:

spatial coherence,electron beam

We developed the method to measure the coherence of electron beams.