[17p-D63-1~16] 7.2 Applications and technologies of electron beams

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[17p-D63-4] Proposal of a Sample for Electron Beam Size Estimation in Scanning Electron Microscope

Daichi Tokura¹, Yuki Soshi¹, 〇Yasunari Sohda¹ (1.Univ. of Tsukuba)

Keywords:

electron beam,electron beam microscpe

One of the fundamental properties of scanning electron microscopes is the electron beam size on the sample. Here, we will use image sharpness (DR value) as a substitute for electron beam size, and propose a sample suitable for evaluating DR values. The sample was prepared by using anisotropic wet etching of silicon. This sample has a smaller variation of DR values in SEM images than conventional Au-evaporated particle samples, and is supposed to be suitable for estimating the electron beam size.