[17p-D63-1~16] 7.2 Applications and technologies of electron beams

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[17p-D63-9] Simulation of Coulomb Effect in Spherical Electron Sources

Koki Himeda¹, 〇Yasunari Sohda¹ (1.Univ. of Tsukuba)

Keywords:

electron beam,scanning electron microscope,Coulomb effect

The fundamental characteristics of electron sources used in scanning electron microscopy is represented by the reduced brightness and energy dispersion. In this study, the influence of the Coulomb effect on the electron source characteristics is investigated by simulation for a spherical electron source, which is expected to have high reduced brightness. As the extraction voltage of the electron source increases, the reduced brightness and energy dispersion increase, and the reduced brightness tends to saturate. It was also found that the characteristics depend on the radius of curvature.