[18a-A22-1~13] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[18a-A22-7] Reduction in Elasticity of In2O3-based Transparent Conductive Films by H Doping

〇Kanta Kibishi¹, Shinri Yamadera¹, Tsubasa Kobayashi¹, Ichiro Takano¹, Shinya Aikawa¹ (1.Kogakuin Univ.)

Keywords:

H Doping,Film Density,Elasticity