Presentation Information
[18a-A22-8]Theoretical Evaluation for Surface Adsorption of by-products in In2O3 Deposition
〇Shogo Shimada1, Tomoya Nagahashi1, Yuki Yoshimoto1, Hajime Karasawa1 (1.KOKUSAI ELECTRIC CORPRATION)
Keywords:
First principle calculation,In2O3,Adsorption
In order to understand mechanism of carbon impurity contamination in ALD method for In2O3 deposition, theoretical evaluation using first-principles calculation for various In precursors have studied.
We calculated the adsorption energies of the by-products generated from the In-precursor chemisorption.
It is suggested that In precursors with a cyclopentadienyl group cause higher carbon impurity because their by-product adsorb to surface strongly.
In this presentation, we will also discuss the effects of the temperature dependence and possibility of other by-products adsorption.
We calculated the adsorption energies of the by-products generated from the In-precursor chemisorption.
It is suggested that In precursors with a cyclopentadienyl group cause higher carbon impurity because their by-product adsorb to surface strongly.
In this presentation, we will also discuss the effects of the temperature dependence and possibility of other by-products adsorption.
Comment
To browse or post comments, you must log in.Log in