[18a-A31-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[18a-A31-1] Fabrication of nanostructured SnO₂ anode films by reactive sputtering and their application to Li-ion batteries

〇Yoshiyuki Hasegawa¹, Tatsuo Ueda¹, Keigo Terada¹, Daiki Fujikake¹, Ryuta Murase¹, Ryosuke Yamazaki¹, Giichiro Uchida¹ (1.Meijo Univ)

Keywords:

sputtering,li-ion batteries