The 85th JSAP Autumn Meeting 2024
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Session Details

Oral presentation8 Plasma Electronics : 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[18a-A31-1~11]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Wed. Sep 18, 2024 9:00 AM - 12:00 PM JST
Wed. Sep 18, 2024 12:00 AM - 3:00 AM UTC
A31 (TOKI MESSE 3F)
Akihisa Ogino(Shizuoka Univ.)
9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[18a-A31-1]Fabrication of nanostructured SnO2 anode films by reactive sputtering and their application to Li-ion batteries

〇Yoshiyuki Hasegawa1, Tatsuo Ueda1, Keigo Terada1, Daiki Fujikake1, Ryuta Murase1, Ryosuke Yamazaki1, Giichiro Uchida1 (1.Meijo Univ)
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9:15 AM - 9:30 AM JST(12:15 AM - 12:30 AM UTC)

[18a-A31-2]Plasma Emission Analysis of Reactive Sputtering Processes in Iron Oxide Thin Film Growth

〇Rintaro Minami1, Eiji Kita1, Hideto Yanagihara1 (1.Tsukuba Univ.)
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9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[18a-A31-3]Evaluation of Ionic Conductivity of Solid Electrolyte LiLaZrO Thin Films for Li-ion Battery Applications.

〇Ryuta Murase1, Tatsuo Ueda1, Keigo Terada1, Yoshiyuki Hasegawa1, Daiki Fujikake1, Ryosuke Yamazaki1, Ryoto Niwa1, Giichiro Uchida1 (1.Meijo Univ.)
Comment()
9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[18a-A31-4]Development of solid electrolyte LiAlGePON thin film and demonstration of the cap effect on Ge anode of Li-ion batteries

〇Daiki Fujikake1, Tomoki Omae1, Tatsuo Ueda1, Keigo Terada1, Yoshiyuki Hasegawa1, Ryuta Murase1, Ryosuke Yamazaki1, Giichiro Uchida1 (1.Meijo Univ.)
Comment()
10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[18a-A31-5]Development of Li ion battery with Si nanoparticle/C anode covered by LiPON film

〇Keigo Terada1, Masayuki Isihara1, Tatsuo Ueda1, Yoshiyuki Hasegawa1, Daiki Fujikake1, Ryuta Murase1, Ryosuke Yamazaki1, Giichiro Uchida1 (1.Meijo Univ.)
Comment()
10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[18a-A31-6]Effects of Substrate Types on BN Films Prepared Using EBEP CVD Method

〇Toru Harigai1, Kenichi Inoue2, Seigo Takashima1, Hiroyuki Kousaka1, Kenji Ishikawa2, Masaru Hori2 (1.Gifu Univ., 2.Nagoya Univ. cLPS)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A31-7]Influence of metallic impurities on the formation of transition layers in cubic boron nitride films

〇Akira Okada1, Yuya Asamoto1, Masao Noma2, Shigehiko Hasegawa3, Michiru Yamashita4, Keiichiro Urabe1, Koji Eriguchi1 (1.Kyoto unuv., 2.SHINKO SEIKI. Co., LTD., 3.Osaka univ., 4.Hyogo Pref. Inst. Technol.)
Comment()
11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A31-8]Speed Control of Circular Orbit Motion of Cathode spot in Vacuum Arc Deposition for AlCrN Film Formation

〇Mirano Oneda1, Seiya Watanabe1, Genki Sano1, Hirofumi Takikawa1, Hiroaki Sugita2, Takahiro Hattori2, Hiroki Gima2 (1.Toyohashi Univ. Technol., 2.OSG Co., Ltd.)
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11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A31-9]Development of composites with metal-class thermal conductivity and elastomer-class flexibility using plasma surface modification and electric field orientation

〇(M2)Rui Hasegawa1,2, Kenichi Inoue1,2, Hitoshi Muneoka1, Tsuyohito Ito1, Kazuhiro Kirihara2, Yoshiki Shimizu2, Yukiya Hakuta2, Kohzo Ito1, Kazuo Terashima1,2 (1.The Univ. of Tokyo, 2.AIST-UTokyo OPERANDO-OIL)
Comment()
11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A31-10]Effect of plasma-formed metal nano structure on bonding characteristics between metal and resins

〇Reo Yasuda1, Koki Nakamura1, Masato Ota1, Hiroaki Kakiuchi1, Hiromasa Ohmi1 (1.Osaka Univ.)
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11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A31-11]Hydrophilization Experiment of Metal Surface by Simultaneous Irradiation of Different Gas Plasmas

〇Natsuki Sakurada1, Akito Shirai1, Taiki Osawa1, Akane Yaida1, Yuji Ohkubo2, Chiaki Sato1, Akitoshi Okino1 (1.Tokyo Tech., 2.Osaka Univ.)
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