[18a-A31-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A31-11] Hydrophilization Experiment of Metal Surface by Simultaneous Irradiation of Different Gas Plasmas

〇Natsuki Sakurada¹, Akito Shirai¹, Taiki Osawa¹, Akane Yaida¹, Yuji Ohkubo², Chiaki Sato¹, Akitoshi Okino¹ (1.Tokyo Tech., 2.Osaka Univ.)

Keywords:

Atmospheric Plasma,Multigas Plasma,Hydrophilization

Surface treatment has been performed with plasma generated by various gases and mixture gas, which has been used to improve adhesion and other properties using multi-gas plasma jet developed in our laboratory. So far, plasma have been generated using mixture gas, but in this study, the experiment was conducted to mix plasmas generated by separate devices and irradiate them to the surface. In this presentation, the hydrophilization effect of the treatment with various gases and mixture gas will be presented.