[18a-A31-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[18a-A31-3] Evaluation of Ionic Conductivity of Solid Electrolyte LiLaZrO Thin Films for Li-ion Battery Applications.

〇Ryuta Murase¹, Tatsuo Ueda¹, Keigo Terada¹, Yoshiyuki Hasegawa¹, Daiki Fujikake¹, Ryosuke Yamazaki¹, Ryoto Niwa¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

LiLaZrO,sputtering,Li ion battery