[18a-A31-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[18a-A31-4] Development of solid electrolyte LiAlGePON thin film and demonstration of the cap effect on Ge anode of Li-ion batteries

〇Daiki Fujikake¹, Tomoki Omae¹, Tatsuo Ueda¹, Keigo Terada¹, Yoshiyuki Hasegawa¹, Ryuta Murase¹, Ryosuke Yamazaki¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

sputtering,lithium ion battery