[18a-A31-1~11] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[18a-A31-5] Development of Li ion battery with Si nanoparticle/C anode covered by LiPON film

〇Keigo Terada¹, Masayuki Isihara¹, Tatsuo Ueda¹, Yoshiyuki Hasegawa¹, Daiki Fujikake¹, Ryuta Murase¹, Ryosuke Yamazaki¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

lithium-ion battery,Sputtering