[18a-B3-1~6] 6.1 Ferroelectric thin films

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[18a-B3-2] Preparation of Zn-Ti-N Piezoelectric Thin Films and The Effect of Al Addition

〇Masato Uehara¹, Yukari Inoue², Kenji Hirata¹, Tomohiro Terada², Junichi Kimura², Hiroshi Yamada¹, Morito Akiyama¹ (1.AIST, 2.TDK Corp.)

Keywords:

piezoelectric,nitride,wurtzite

Nitrides have stronger covalent bonds than oxides and have superior mechanical properties. Wurtzite nitrides exhibit excellent piezoelectric properties and are used in radio-frequency filters. In this study, Zn-Ti-N thin films were prepared by sputtering and the piezoelectric properties was evaluated. Additionally, the effect of adding Al was also investigated.