The 85th JSAP Autumn Meeting 2024
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Session Details

Oral presentation6 Thin Films and Surfaces : 6.1 Ferroelectric thin films

[18a-B3-1~6]6.1 Ferroelectric thin films

Wed. Sep 18, 2024 10:30 AM - 12:00 PM JST
Wed. Sep 18, 2024 1:30 AM - 3:00 AM UTC
B3 (Exhibition Hall B)
Takeshi Yoshimura(Osaka Metro. Univ.)
10:30 AM - 10:45 AM JST(1:30 AM - 1:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-B3-1]Rectangular cathode sputtering for large area deposition of c-Axis oriented and tilted ScAlN thin films

〇(M2)Kohei Ekida1,2, Yohkoh Shimano1,2, Takahiko Yanagitani1,2 (1.Waseda Univ., 2.ZAIKEN)
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10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[18a-B3-2]Preparation of Zn-Ti-N Piezoelectric Thin Films and The Effect of Al Addition

〇Masato Uehara1, Yukari Inoue2, Kenji Hirata1, Tomohiro Terada2, Junichi Kimura2, Hiroshi Yamada1, Morito Akiyama1 (1.AIST, 2.TDK Corp.)
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11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[18a-B3-3]Investigation of low-temp. epitaxial growth of Ce,Mn substituted ZnO thin films
and electrical characterization

〇Moe Sakaguchi1, Hiroya Oiso1, Norifumi Fujimura1, Takeshi Yoshimura1 (1.Osaka Metro. Univ.)
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11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-B3-4]SMR with epitaxial metal Bragg reflectors on top and bottom electrodes to reduce electrode resistance

〇(M1)Misaki Tomioka1,2, Takahiko Yanagitani1,2 (1.Waseda Univ., 2.ZAIKEN)
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11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[18a-B3-5]Evaluation of thickness dependence on ferroelectricity in (Al,Sc)N-based FeRAM

〇Soshun Doko1, Naoko Matsui1, Toshikazu Irisawa1, Koji Tsunekawa1, Nana Sun2, Yoshiko Nakamura2, Kazuki Okamoto2, Hiroshi Funakubo2 (1.Canon ANELVA Corp., 2.Tokyo Tech.)
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11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[18a-B3-6]Fabrication of Al1-xScxN/Si heterostructure by sputtering method Ⅱ

〇Hiroto Yamada1, Koki Yasuoka1, Norifumi Fujimura1, Takeshi Yoshimura1 (1.Osaka Metro. Univ.)
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