[18a-B3-1~6] 6.1 Ferroelectric thin films

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-B3-4] SMR with epitaxial metal Bragg reflectors on top and bottom electrodes to reduce electrode resistance

〇(M1)Misaki Tomioka^1,2, Takahiko Yanagitani^1,2 (1.Waseda Univ., 2.ZAIKEN)

Keywords:

SMR,epitaxial growth,electrode resistance

Increase of electrode resistance, which is caused by thinner electrodes in the higher frequency BAW resonator, leads Q factor degradation. In this study, we propose full-epitaxial SMR with epitaxial metal Bragg reflectors used as a top electrode. Epitaxial ScAlN SMR with top and bottom metal acoustic Bragg reflectors were fabricated by RF magnetron sputtering. The crystallinity of each layer was confirmed by TEM. Clear diffraction spots can be observed in each layer, indicating that the bottom electrode, piezoelectric layer, and top electrode are epitaxially grown.Furthermore, a reduction of electrodes resistance was confirmed in the ScAlN piezoelectric layer SMR with top metal acoustic Bragg reflector electrodes.