[18a-B4-1~10] 6.6 Probe Microscopy

10:15 AM - 10:30 AM JST(1:15 AM - 1:30 AM UTC)

[18a-B4-6] Fabrication of probes for non-gap mode tip-enhanced Raman spectroscopy using FIB

〇Kazunori Hirosawa¹, Kaifeng Zhang², Masanori Hara¹, Masamichi Yoshimura¹ (1.Toyota Tech. Inst., 2.Hitachi, Ltd.)

Keywords:

Tip-Enhanced Raman Spectroscopy,Focused Ion Beam,Carbon materials

In the development of functional materials and devices, nondestructive and high-resolution structural evaluation, such as composition analysis and identification of impurities at the submicron and nanometer level, is strongly desired, and TERS has attracted attention as one of the analytical methods for this purpose. Conventional TERS requires a gold substrate, but in this study, we succeeded in developing a TERS tip that can be used in the non-gap mode by machining the tip tip using FIB. Using this tip, we measured GO monolayer films on SiO2 substrate.