Presentation Information
[18a-B4-9]Considering an Automated Method to Adjust Feedforward Controller Parameters in Scanning System
〇Kazuki Miyashita1, Shinji Watanabe2 (1.Grad.Sch.Math.&Phys.,Kanazawa Univ, 2.WPI-NanoLSI, Kanazawa Univ.)
Keywords:
feedforward control,scanning ion conductance microscopy
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