[18a-P06-1~19] 13.7 Compound and power devices, process technology and characterization

[18a-P06-12] Effect of diluting solvents on wet etching of N-polar GaN

〇Yunosuke Higuchi¹, Ryoko Ono¹, Satoko Shinkai¹ (1.Kyushu Inst. of Technology)

Keywords:

Gallium nitride,wet etching