[18a-P07-1~12] 15.4 III-V-group nitride crystals

[18a-P07-2] Dependence of the annealing effect on its atmosphere for the low-pressure CVD grown hexagonal boron nitride thin films.

〇Akira Takemura¹, Taiki Oishi¹, Ruki Aoike¹, Souma Ota¹, Yuma Takahashi¹, Yuko Kominami¹, Kazuhiko Hara^1,2,3 (1.Shizuoka Univ., 2.Medical Photonics Inst., 3.Shizuoka Electronics Inst.)

Keywords:

hexagonal boron nitride,CVD,thin film