Presentation Information
[18a-P07-3]Evaluation of polymorphism of BN thin films grown by low-pressure CVD
〇Soma Ota1, Ruki Aoike1, Yuma Takahashi1, Akira Takemura1, Hiroko Kominami1, Kazuhiko Hara2,3 (1.Shizuoka Univ., 2.Medical Photonics., 3.Elec. Res. Inst.)
Keywords:
BN,CVD,hexagonal boron nitride
Comment
To browse or post comments, you must log in.Log in