Presentation Information
[18a-P07-4]Carbon incorporation in hexagonal boron nitride thin films grown by low-pressure CVD using BCl3 as a source and its effect on the film properties
〇Ruki Aoike1, Taiki Oishi1, Soma Ota1, Akira Takemura1, Hiroko Kominami1, Kazuhiko Hara1,2,3 (1.Shizuoka Univ., 2.Medical photonics, 3.Elec. Res. Inst.)
Keywords:
BN,CVD,carbon
Comment
To browse or post comments, you must log in.Log in