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[18p-A22-15]Crystal growth of Sb doped r-GeO2 thin films on r-TiO2 substates

〇Toya Yagura1,2, Yuri Shimizu1,2, Toyosuke Ibi1, Isao Takahashi1, Kentaro Kaneko1,3 (1.Patentix Inc., 2.Col. of Sci. & Eng. Ritsumeikan Univ., 3.RISA)
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Keywords:

semiconductor


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