[18p-A22-1~21] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-A22-5] Study of MOVPE growth mechanisms of β-Ga₂O₃ using trimethylgallium

〇(M1)Yuma Terauchi¹, Takahito Okuyama¹, Kakeru Kubota¹, Junya Yoshinaga^1,2, Syogo Sasaki³, Masato Ishikawa⁴, Yoshinao Kumagai^1,3 (1.Tokyo Univ. of Agric. and Tech., 2.TAIYO NIPPON SANSO CORPORATION, 3.TUAT FLOuRISH, 4.Gas-Phase Growth Ltd.)

Keywords:

MOVPE