[18p-A22-1~21] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

4:00 PM - 4:15 PM JST(7:00 AM - 7:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18p-A22-9] Well Composition Dependence of Rocksalt-structured MgZnO/MgO Quantum Wells
Grown by Mist CVD Method

〇Hiroyuki Aichi¹, Kotaro Ogawa¹, Toshiki Mitomi¹, Tomohiro Yamaguchi¹, Tohoru Honda¹, Takeyoshi Onuma¹ (1.Kogakuin Univ.)

Keywords:

MgZnO,Mist CVD,Quantum well

Rocksalt-structured MgZnO is a promising material for deep UV and vacuum UV LEDs. In this study, rock salt structure MgZnO/MgO MQW was fabricated by mist CVD method, and surface observation by AFM was performed. 0.30 nm RMS was obtained, which is comparable to that of monolayer films. The crystal structure was evaluated by XRD and satellite peaks were observed. This suggests that excellent interface planarity and periodicity are maintained.