[18p-A31-1~19] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[18p-A31-2] Functionalization of PTFE with Hydroxyl Groups Using the PE-MBF Method

〇Kohshi Taguchi¹, Tomikawa Mina¹, Yamahara Motohiro¹, Noborio Kazuyuki¹ (1.SAKIGAKE-Semiconductor Co., Ltd.)

Keywords:

plasma,PTFE,PE-MBF method

PTFE (Polytetrafluoroethylene) is widely used due to its excellent chemical stability, low friction, and high hydrophobicity. In industrial applications, it is necessary to functionalize PTFE with OH groups to improve adhesion and hydrophilicity. Traditional methods involve multiple steps and short-lived Na-based reagents, but the newly developed SAM technology is environmentally friendly and safe. This study investigated the process of functionalizing PTFE with OH groups using this technology, and an improvement in hydrophilicity was observed.